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Microstructure and Tribological Behavior of Cr-Cu-N Coatings Deposited by Ion Beam Assisted Magnetron Sputtering

机译:离子束辅助磁控溅射沉积Cr-Cu-N涂层的组织与摩擦学性能

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Cr-Cu-N coatings with copper content from 0 at% to 6.8 at% were deposited on silicon and M2 steel by ion beam assisted magnetron sputtering. The microstructure and composition of the coatings were characterized using SEM, GDOES, XRD and XPS. The mechanical properties of the coatings were tested on a standard hardness tester. The tribological behavior of the coatings in dry wear condition was studied by means of ball-on-disc wear test. The experimental results show that addition of copper can restrict the columnar crystal growing to a certain degree. XRD and XPS analysis indicate that coatings are mainly composed of Cr and CrN phase. Cu is mainly existed in a free state in the coatings. Copper adding has no obvious effects on the hardness of the coatings. However, the coatings fracture toughness can be improved by doped copper. The coefficient of friction of the coatings against bearing steel is in the range of 0.25-0.6 changing with the copper content. The coating with 2.6 at% copper shows the lowest coefficient of friction about 0.25 and wear rate which is about one tenth of that of the coating with 6.8 at% copper. The higher coefficient of friction and wear rate of the coating with 6.8at% copper may be attributed to its lower bonding strength.
机译:通过离子束辅助磁控溅射在硅和M2钢上沉积铜含量为0at%至6.8at%的Cr-Cu-N涂层。使用SEM,GDOES,XRD和XPS对涂层的微观结构和组成进行了表征。在标准硬度测试仪上测试涂层的机械性能。通过圆盘磨损试验研究了涂层在干磨损条件下的摩擦学行为。实验结果表明,铜的加入可以在一定程度上限制柱状晶体的生长。 XRD和XPS分析表明,涂层主要由Cr和CrN相组成。 Cu主要以游离态存在于涂层中。铜的添加对涂层的硬度没有明显的影响。但是,掺杂铜可以提高涂层的断裂韧性。涂层对轴承钢的摩擦系数在0.25-0.6范围内,随铜含量的变化而变化。含2.6 at%铜的涂层显示出最低的摩擦系数,约为0.25,且磨损率约为含6.8 at%铜的涂层的十分之一。含6.8at%铜的涂层的较高摩擦系数和磨损率可归因于其较低的粘结强度。

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