Pre-sputtering Condition for Crystallized Yttria Stabilized Zirconia (YSZ) Film Deposition on Cellulose Nanopaper (CNP) by Reactive Sputtering

机译：反应溅射法在纤维素纳米纸（CNP）上沉积结晶的氧化钇稳定的氧化锆（YSZ）膜的预溅射条件

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From this experiment, it was found that stable target and discharge condition are very important to deposit highly crystallized YSZ films. In the presentation, investigation results on improvement of YSZ crystallinity will be shown and discussed in detail.

机译：从该实验中发现，稳定的靶和放电条件对于沉积高度结晶的YSZ膜非常重要。在演示中，将详细展示和讨论改善YSZ结晶度的研究结果。

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《応用物理学会秋季学術講演会;応用物理学会》||05.302|共1页
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Jyotish Patidar; Susumu Horita;
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1. Improvement of the electrical properties of heteroepitaxial yttria-stabilized zirconia (YSZ) films on Si prepared by reactive sputtering [J] . S. Horita, H. Nakajima, T. Kuniya Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2000,第2a3期

机译：反应溅射制备Si上异质外延钇稳定氧化锆（YSZ）薄膜的电学性能
2. Growth of epitaxial bismuth ruthenate pyrochlore films on yttria-stabilized zirconia (YSZ) and YSZ-buffered Si substrates by metal-organic chemical vapor deposition [J] . Chiba Hirokazu, Ikariyama Rikyu, Yasui Shintaro, Thin Solid Films . 2019,第JANa1期

机译：金属有机化学气相沉积法在氧化钇稳定的氧化锆（YSZ）和YSZ缓冲的Si衬底上生长外延钌酸铋烧绿石薄膜
3. Material properties of heteroepitaxial yttria-stabilized zirconia films with controlled yttria contents on Si prepared by reactive sputtering [J] . S. Horita, M. Watanabe, S. Umemoto, Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 1998,第4期

机译：反应溅射法在Si上制备钇含量受控的异质外延钇稳定氧化锆膜的材料性能
4. Deposition of Crystallized Yttria Stabilized Zirconia (YSZ) Films on Cellulose Nanopaper (CNP) Substrates at Low Temperature by Reactive Sputtering [C] . Jyotish Patidar, Susumu Horita . -1

机译：通过反应溅射在低温下沉积在纤维素纳米玻璃（CNP）底物上的结晶氧化钇稳定的氧化锆（YSZ）膜
5. Phase formation and microstructure in reactively sputter-deposited zirconia and yttria-stabilized zirconia coatings. [D] . Ji, ZhiQiang. 1999

机译：反应溅射沉积的氧化锆和氧化钇稳定的氧化锆涂层的相形成和微观结构。
6. Fracture toughness improvements of dental ceramic through use of yttria-stabilized zirconia (YSZ) thin-film coatings [O] . Ryan N. Chan, Brian R. Stoner, Jeffrey Y. Thompson, -1

机译：通过使用氧化钇稳定的氧化锆（YSZ）薄膜涂层改善牙科陶瓷的断裂韧性
7. Deposition of yttria-stabilized zirconia thin films by high power impulse magnetron sputtering and pulsed magnetron sputtering [O] . Sønderby, Steffen, Aijaz, Asim, Helmersson, Ulf, 2014

机译：大功率脉冲磁控溅射和脉冲磁控溅射沉积钇稳定的氧化锆薄膜

Pre-sputtering Condition for Crystallized Yttria Stabilized Zirconia (YSZ) Film Deposition on Cellulose Nanopaper (CNP) by Reactive Sputtering

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