Design and fabrication of HOE for clock distribution in integratedcircuits

摘要

The authors present the design and fabrication of HOE for clockdistribution. The set-up consists of a HOE imaging a source(semiconductor laser) onto multiple photodetectors in an integratedcircuit. They have studied and fabricated a multi-focus doublet HOE. Theaberrations due to the wavelength shift between recording (λ-488nm) and reconstruction (λ=780 nm) have been minimized by anappropriate recording and readout geometry. The diffraction efficiencyhas been optimized by a copying technique