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Monolithically integrated silicon photonic chip sensor for nearinfrared trace-gas spectroscopy

机译:单片集成硅光子芯片传感器,用于近红外微量气体光谱

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We present a fully integrated photonic chip spectrometer for near-infrared tunable diode laser absorption spectroscopy ofmethane (CH4). The integrated photonic sensor incorporates a heterogeneously integrated III-V laser/detector chipcoupled to a silicon external cavity for broadband tuning, and a long waveguide element (> 20 cm) for ambient methanesensing. An on-chip sealed CH4 reference cell is utilized for in-situ wavelength calibration of the external cavity, and areal-time wavelength compensation method for laser calibration is described and demonstrated. The resulting signal isguided back to the III-V photodiodes for spectral signal readout using a custom-designed acquisition board, remotelycontrolled and operated by a Raspberry Pi unit. Component-level testing of the waveguide sensitivity, external cavitylaser, and reference cell is demonstrated. Full-stack testing of the integrated sensor chip yields sub-100 ppmv∙Hz-1/2sensitivity, and spectral density analysis demonstrates our integrated chip sensor to have a fundamental performancewithin an order of magnitude of commercially available fiber-pigtailed DFB laser units. We envision our integratedphotonic chip sensors to provide disruptive capability in SWaP-C (size, weight, power, and cost) limited applications,and we describe an achievable short-term pathway towards sensitivity enhancement to near-10 ppmv levels.
机译:我们提出了一种完全集成的光子芯片光谱仪,用于近红外可调谐二极管激光吸收光谱 甲烷(CH4)。集成的光子传感器集成了异构集成的III-V激光/检测器芯片 耦合至硅外部空腔以进行宽带调谐,并耦合至用于环境甲烷的长波导元件(> 20厘米) 感应。片上密封的CH4参考池用于外腔的原位波长校准, 描述并演示了用于激光校准的实时波长补偿方法。结果信号是 被引导回III-V光电二极管以使用定制设计的采集板远程读取光谱信号 由Raspberry Pi单元控制和操作。波导灵敏度,外腔的组件级测试 激光,并显示参考电池。集成传感器芯片的全栈测试可产生低于100 ppmv∙Hz-1 / 2的结果 灵敏度和光谱密度分析证明我们的集成芯片传感器具有基本性能 在商业上可获得的光纤尾纤DFB激光器单元的数量级之内。我们设想我们的综合 光子芯片传感器可在受限的SWaP-C(尺寸,重量,功率和成本)应用中提供破坏性功能, 并且我们描述了将灵敏度提高到接近10 ppmv水平的可实现的短期途径。

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