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Monolithically integrated silicon photonic chip sensor for nearinfrared trace-gas spectroscopy

机译:用于接近过的微量气体光谱的单片集成硅光子芯片传感器

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We present a fully integrated photonic chip spectrometer for near-infrared tunable diode laser absorption spectroscopy ofmethane (CH4). The integrated photonic sensor incorporates a heterogeneously integrated III-V laser/detector chipcoupled to a silicon external cavity for broadband tuning, and a long waveguide element (> 20 cm) for ambient methanesensing. An on-chip sealed CH4 reference cell is utilized for in-situ wavelength calibration of the external cavity, and areal-time wavelength compensation method for laser calibration is described and demonstrated. The resulting signal isguided back to the III-V photodiodes for spectral signal readout using a custom-designed acquisition board, remotelycontrolled and operated by a Raspberry Pi unit. Component-level testing of the waveguide sensitivity, external cavitylaser, and reference cell is demonstrated. Full-stack testing of the integrated sensor chip yields sub-100 ppmv?Hz-1/2sensitivity, and spectral density analysis demonstrates our integrated chip sensor to have a fundamental performancewithin an order of magnitude of commercially available fiber-pigtailed DFB laser units. We envision our integratedphotonic chip sensors to provide disruptive capability in SWaP-C (size, weight, power, and cost) limited applications,and we describe an achievable short-term pathway towards sensitivity enhancement to near-10 ppmv levels.
机译:我们为近红外线可调二极管激光吸收光谱提供了一种完全集成的光子芯片光谱仪甲烷(CH4)。集成的光子传感器包括异构集成的III-V激光/探测器芯片耦合到硅外腔,用于宽带调谐,以及用于环境甲烷的长波导元件(> 20cm)传感。片上密封的CH4参考电池用于外腔的原位波长校准,以及描述和说明了激光校准的实时波长补偿方法。得到的信号是返回到III-V光电二极管,用于使用定制设计的采集板,远程使用定制的采集板读出由覆盆子PI单元控制和操作。波导灵敏度的组件级测试,外腔演示激光和参考电池。集成传感器芯片的全堆栈测试产生Sub-100 PPMV?HZ-1/2灵敏度,光谱密度分析表明我们的集成芯片传感器具有基本性能在市售的纤维尾纤DFB激光器单元的幅度范围内。我们设想我们的整合光子芯片传感器在SWAP-C(尺寸,重量,功率和成本)有限的应用中提供破坏性能力,我们描述了一个可实现的短期途径,敏感性增强到接近10ppmV水平。

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