In this paper, a micro-opto-mechanical polymeric cantilever based Fabry Perot Interferometer(CFPI) is reported as anoptical fiber sensor. To be able to fabricate the sensor, a mold for the polymeric cantilever was fabricated using polymethyl methacrylate (PMMA) and with which a polydimethylsiloxane (PDMS) cantilever was constructed. After releasingthe cantilever from the mold, cantilever and SMF were integrated together. As a result, a cavity was formed between SMFcleaved end and cantilever surface. When vibration is applied, the distance between the cantilever free end and cleavedend SMF changes, consequently the optical patch length of the sensor structure altered dynamically. Here, the effect ofdifferent frequencies and their amplitudes on the sensor spectrum is studied by using FFT and STFT analysis method.
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