Double pulse LED illumination for phase detection in RGB-Interferometry

摘要

This contribution considers the application of pulsed LED illumination, synchronized with the exposure gapof a CMOS Bayer camera and an oscillating reference mirror, to record two π/2 phase shifted interferogramsfor quadrature based phase retrieval. Measurements of a superfine roughness standard in lateral motion arepresented, demonstrating the capability of the setup to record the surface topography of moving objects. Theapplication of the interferometric measurement data to calibrate a topography measuring wave front sensor,which is employed to support surface unwrapping is also discussed.