Statistical machine control: a practical approach to totalproductive maintenance of semiconductor equipment

摘要

Statistical Machine Control (SMC) encompasses the totalmaintenance effect on equipment. This approach steps far beyond the“fix it” attitude that has often been the understood job ofa maintenance technician. SMC incorporates Total Quality Management(TQM) practices, the predictive and preventive maintenance programs. Thegoal of the program is to maximize uptime while continuing: to reducevariation. Variation has an effect on product yields, and equipment canbe a major cause of the total variation in a factory. SMC addressesthese concerns, and it requires a change in mind set that takes time,training and a lot of energy to bring to fruition. SMC works if theorganization is committed to overcome the stumbling blocks along theway. This paper is illustrated with four practical examples