Impact of minienvironments on facilities cost

摘要

The Strategic Future Fab Study considered minienvironments as analternative to more traditional “ballroom” full filterceiling design configurations. The study determined that there were realcost savings associated with implementing minienvironment use. Tangiblesavings in the area of HVAC equipment first cost, ongoing energy costreduction, and clean room garment cost saving, were identified anddollar values for the specific facilities under consideration assigned.Additional factors such as facility modification flexibility due to toolisolation, process isolation permitting varied temperature/humidityconditions to be maintained, simplified process tool electrical/pipingdesign and routing, and increased operator safety were identifiedwithout assigning dollar values for savings