Laser ablation forward deposition of metal lines for electricalinterconnect repair

摘要

Flat-panel display interconnect repair requires an open air(vacuum-system-free), environmentally friendly, dry process with aminimum number of steps. The Laser Ablation Forward Deposition (LAFD)approach described in this paper offers such advantages with thepotential for low cost. The Laser Ablation Forward Deposition techniquetransfers metallic film from a glass support to a nearby substrate bylaser ablation. This technique can deposit a wide range of metals