Quasi static analysis of hybrid and monolithic integrated circuitsinterconnections

摘要

Integrated-circuit interconnections are analyzed in quasi-staticmode using the method of lines. The coupling capacitances are determinedfor monolithic and hybrid structures having parallel multiconductors attwo different dielectric layer interfaces. The anisotropy effects on thecoupling between crossing conductors are investigated for differentdimensions of strip width and substrate thickness. The anisotropy effecton the couplings increases with wider strips and thinner substrates. Thecoupling capacitances are also investigated for parallel conductors onan isotropic substrate. For parallel coplanar conductors the couplingsincrease with closer strips and thicker substrates, while for conductorson different interfaces the coupling capacitance increases for widerstrips and thinner substrates. The number of strips affects thecouplings for thicker dielectric substrates