More applications of uncooled microbolometer sensors

摘要

Abstract: Lockheed Martin IR Imaging Systems is developing lowcost, high performance, uncooled infrared imagingproducts for both military and commercial applications.These products are based on microbolometer technology,a silicon micromachined sensor that combines waferlevel silicon processing with a device structurecapable of yielding excellent imaging performance.Here, in the first of a series of papers, we report onseveral applications that are utilizing the LockheedMartin microbolometer sensor. The performance of ourbasic uncooled sensor has been measured (and reportedin multiple papers) to determine sensor capabilitiesfor insertion into both military and commercialproducts. Non-linearity of the sensor over a scenetemperature range of 95 degrees Celsius is less than0.5%. Our sensors typically have temporal NETDs of lessthan 70 mK as well as spatial NETDs of less than 50 mK.MRTD performance is less than 0.4 degrees Celsius atspatial frequencies more than 20% beyond Nyquist.Spatial noise variation over time has been measured andfound to meet both commercial and military requirementswith excellent spatial noise over wide scene andambient temperature ranges. Some of the multipleapplications in which our uncooled sensors have beenused have just recently been described in one reportdemonstrating the varied and unique uses of thisproduct. Our sensor is now used by dozens of partnersand customers for applications ranging from hand-heldradiometric cameras to driving aids; from driver's aidsto miniature cameras from rifle sights to radiometers.These applications will be discussed along with theirunique system level performance parameters. Video willbe used to demonstrate the various applicationsdiscussed. !10