Abstract: The inhibitor function and the photoreactive functions of the PACs of dissolution inhibition resists are independent of each other, and new PACs may be designed by joining strong inhibitors to conventional DNQs, provided the acceptor groups of the inhibitors are within reach of the thermal pulse emanating from the DNQ on exposure. The strength of inhibitors depends on the basicity of their acceptor groups, and that can be affected by substitution, by restructuring the acceptor group proper, and by increasing the size of the aromatic units attached to it.!3
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