Study of phase transition VO2 thin film

摘要

Abstract: Vanadium dioxide thin film that has semiconductor-to-metal phase transition has been obtained by either reactive evaporation or reactive ion assisted deposition with subsequent annealing processes. Various kinds of measurement methods have been developed in investigation of phase transition properties of vanadium dioxide films. It is observed that the performance of phase transition properties strongly depends upon the stoichiometric and crystalline characteristics of the thin film.!11