Advanced EDX Analysis for Memory Devices

摘要

Energy Dispersive X-ray (EDX) is a commonly used tool for elemental analysis in failure analysis for years. EDX tool can perform qualitative and quantitative elemental analysis to identify various chemical elements and characterize the material properties. Computer-aided imaging is a rapidly growing area that has significantly enhanced the EDX capability in recent years. In this paper, we will share some newly developed EDX elemental mapping techniques including QMap and ROI map, and spectra processing using peaks deconvolution. These techniques have advanced the elemental analysis in both graphical and numerical approaches.