High vacuum in MEMS

摘要

This paper discuss the problem of generating high vacuum in miniature devices. Currently used methods of hermetic encapsulation and getter technique do not allow to provide stable high vacuum conditions. Alternative approach - on-chip pumping - that is proposed by us is promising but still needs many basic research. The ion-sorption micropump recently elaborated by our group is now in details characterized, the influence of different parameters on its operation is investigated and mechanisms responsible for the pumping process are examined.