Cryogenic Electrical Characterization and Equivalent-Circuit Modeling of SAW Resonators

摘要

A surface acoustic wave resonator (SAW) was characterized by means of scattering (S-) parameters, recorded over the wide temperature range spanning from 300 K down to 20 K with a step of 10 K. The frequency- and temperature-dependent behavior was investigated and the experimental data were employed to extract equivalent circuit models able to represent the device close to the values of the observed resonant frequencies. The experimental activity is performed with the two-fold purpose of assessing the temperature sensing properties of the studied SAW, even down to cryogenic temperatures, and of enabling the design of low noise oscillators.