A Driving Distance Extended Piezoelectric Actuator Using Multidriving Pads and Capacitive Patches

摘要

In recent decades, piezoelectric actuators have many commercial applications. A compact design of a linear piezoelectric actuator carrying a sled was proposed and the required assembly volume of this linear piezoelectric actuator is relatively small to another linear piezoelectric actuator. The driving range (DR) of the piezoelectric actuator has been defined as the in-phase range for driving edge in x- and y- components. To extend the driving distance of a piezoelectric actuator, the in-phase range and amplitude of the driving edge were analyzed by utilizing finite element method under various dimensions of driving electrodes. To achieve the self-position-sensing function, a pair of comb-shaped electrodes were designed and integrated into the piezoelectric actuator as a capacitive position sensor. A capacitance readout integrated circuit (IC) was connected to a microcontroller unit (MCU) by using an inter-integrated circuit $(ext{I}^{2}ext{C})$. A digital filter based on the Kalman filter was developed to process the capacitance signal in real time and implanted in a MCU, thereby suppressing the noise of the capacitance signal.