Flexible Integrated Sensor Array for Pressure, Humidity and Temperature Sensing*

摘要

Flexible sensor array has been developed to mimic the properties of natural existed structure or feature with multiple functionalities. However, it's still an intriguing challenge to make sensor array possess real sense like human fingerprint, since the most crucial challenge is the simultaneous achievement of various sensing signals without mutual interference. In this study, we have demonstrated a fingertip skin-inspired flexible integrated sensor array based on three designed CNT-based sensing materials by silk-screen printing technique, which can discriminate the multiple spatial tactile stimuli containing pressure, temperature, and humidity, respectively. For pressure sensing, the range from 0.65 mN to 0.6 N can be detected with high stability and low limit of 0.65 mN, as well as the response to humidity change of RH 5%-90% and the temperature variation of 25°C-70°C with accuracy of 0.5°C, which basically covers the perception of the human figure to external synchronizing signal. Furthermore, this sensor array is employed to attach on a figure and to sense the common behavior of holding a bottle filled with hot water, which displays excellent response signals. This developed sensor array will reveal the favorable application in the enhanced perception of artificial prosthesis, intelligent robot, and human machine interface.