Broadband and Polarization Insensitive Surface Optical Coupler using Vertically Curved Waveguides Fabricated with ArF-Immersion Lithography

摘要

Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <;2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.