Transient Response of Miniaturized Piezoresistive Sensors for Side-On Pressure Shock Wave in Air

摘要

Transient response of a miniaturized silicon piezoresistive sensor is simulated here for the first time when a pressure shock wave propagates along the sensor's surface, or equivalently, for side-on pressure shock wave in air. These mechanical simulations show that it is possible to reduce the sensor's reaction time by a factor about 10 from carefully adjusting the membrane dimensions.