Large-Area, Single Material Metalens in the Visible: An Approach for Mass-Production Using Conventional Semiconductor Manufacturing Techniques

摘要

We present mass-producible, large area, single-material metalens working in the visible wavelength, using conventional deep-ultraviolet (DUV)stepper lithography technique. Having a diameter of 1 cm, our present lensindependent, near-diffraction limited focusing behavior.