CuO nanowires sensor of gases

摘要

In this paper, we present the results studies of CuO layers obtained in different thermal condition. The samples were prepared with composed PVD and thermal oxidation processes. Due to PVD process C-Ni layer on Cu, plate was prepared and such layer was annealed in thermal oxidation process at the temperatures 400 and 500 °C. These two kind of sensors showed different electrical responses on hydrogen and ammonia gases what was connected to different topography of the layers. The adsorption desorption mechanism of reacting gases with developed surface of CuO layer influences on the electrical response.