SiN Integrated Photonics for near-infrared LIDAR

摘要

We present a SiN photonic platform for applications in the 800-1000 nm wavelength range. We demonstrate low-loss waveguides, splitters, grating couplers and phase-shifters. We report on the use of integrated SiN circuits for LIDAR applications and show beam steering over 17.7° using a SiN integrated optical phased array.