The methods of data collection and tool processing time estimation in lot processing

机译：批次处理中的数据收集和工具处理时间估计方法

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This article explains a new method for estimating tool processing time with high accuracy by interrelating tool processing model, tool processing time classification and event data. Tool processing time data with high accuracy is applied to the production scheduler, which enables making a highlyaccurate operation plan. This approach also enables an analysis of tool setup time (B value).

机译：本文通过相互关联工具处理模型，工具处理时间分类和事件数据，借助于估计工具处理时间的新方法。刀具处理具有高精度的时间数据应用于生产调度程序，这使得能够进行高度准确的操作计划。这种方法还可以分析刀具设置时间（B值）。

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《International Symposium on Semiconductor Manufacturing》|2007年||共4页
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Hisashi Hosoe; Nobuo Knanamori; Kouhei Yoshida; ISSM;
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中图分类 TN305-53;
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The methods of data collection and tool processing time estimation in lot processing

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