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A Sensitive Technique to Enable Technology Transfer and Fab Matching in Deep Sub-Micron Technologies

机译:一种敏感的技术在深次微米技术中实现技术转移和FAB匹配

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A sensitive floating-gate integrator technique using single-poly pFET NVM technology has been developed and utilized to enable technology transfer and improved fab matching of logic NVM designs in a standard logic CMOS process. With utilization of our technique, an abnormal parasitic RC relaxation phenomenon observed in a floating gate design was effectively characterized across six foundries and from 0.35μm to 90nm logic CMOS technologies. The technique is used as a powerful tool to debug manufacturing issues and to monitor the manufacturability of advanced technologies.
机译:已经开发出并利用了一种使用单多聚pFET NVM技术的敏感浮栅集成器技术,并利用了在标准逻辑CMOS过程中的逻辑NVM设计的技术转移和改进的FAB匹配。通过利用我们的技术,在浮栅设计中观察到的异常寄生RC松弛现象在六个铸造件和0.35μm至90nm逻辑CMOS技术中有效地表征。该技术被用作调试制造问题的强大工具,并监控先进技术的可制造性。

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