首页> 外文会议>International Symposium on Semiconductor Manufacturing >Real Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method
【24h】

Real Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method

机译:流动颗粒跟踪法实时测量液体中颗粒的精确尺寸和折射率

获取原文

摘要

It is known that particle size obtained from the Brownian motion of a particle is called the diffusion coefficient equivalent size (DCES) and is close to the geometric size independent of the physical properties of particle. This paper describes that we succeeded in measurement of particle size and the number concentration of particles by a new instrument that measures the displacement of particles by Brownian motion except the influence of flow field in real time using the flow particle tracking (FPT) method. Furthermore, we succeeded in evaluation of refractive index of particles by simultaneous measurement of DCES and light scattering intensity of particles.
机译:已知从粒子的布朗运动获得的粒径称为扩散系数当量尺寸(DCES),并且接近于独立于粒子物理性质的几何尺寸。本文介绍了我们通过一种新型仪器成功地测量了粒径和颗粒数浓度,该仪器使用流动粒子跟踪(FPT)方法实时测量了布朗运动(除了流场的影响之外,还通过布朗运动测量了颗粒的位移)。此外,通过同时测量DCES和颗粒的光散射强度,我们成功地评估了颗粒的折射率。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号