The methods for evaluating the quality of the protective coating to the size etching of quartz glass with hydrofluoric acid were proposed. Molybdenum coating is generated with the installation NIKA 2012 TN by magnetron sputtering. Quartz glass with a roughness of Ra less than 1 nm was used. Discontinuity of coating was determined by the method of electron microscopy and energy dispersive analysis. Mathematical modeling of the hydrofluoric acid diffusion process performend via the molybdenum film was implemented. X-ray analysis of the coating was carried out to determine the residual internal stresses. We concluded that the studied phenomena affect the quality of the glass surface after etching. magnetron sputtering, molybdenum films, microelectromechanical sensors, accelerometers, quartz glass.
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