Optimization study for fabrication of micro-scale stacked dielectric elastomer actuators

摘要

Fabrication of micro-scale DEAs could benefit many fields including micro-robots, micro-optical systems besides reducing the driving voltage from kV scale to possibly sub-100V range. In an earlier study, proof of concept fabrication methods for PDMS-based fiber-like micro-sized stacked dielectric elastomer actuators were introduced. This study tried to optimize the fabrication process by investigating the effect of different fabrication approaches and different design geometries on the performance of micro-sized DEAs. Micro-sized DEAs with different geometrical parameters were fabricated. Several fabrication steps were modified and the effectiveness of the new fabrication steps and parameters were investigated.