Large range tracking of an XY compliant nanomanipulator with nonlinear stiffness

摘要

The inevitable nonlinearity of beam flexure cannot be ignored, which poses challenges for large range tracking of compliant nanomanipulating systems with nanometric motion quality. In this paper, the nonlinear stiffness of a self-developed large range XY compliant nanomanipulator is analytical modeled and experimentally verified. Then a feedback linearization technique is adopted to compensate the stiffness nonlinearity. Once the dynamic model is transformed to a linear system, the repetitive control is utilized to track periodic trajectories. Finally, the effectiveness and performance of the developed control strategy are experimentally verified, showing that the enhanced tracking performance with 87.4 nm(RMS) and stroke to over 1 × 1 mm² can be achieved.