Interrelation of metrology, testing and quality in semiconductor production

机译：半导体生产中的计量，测试和质量之间的相互关系

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摘要

The effect of metrology on products testing, conformity assessment and quality systems is analyzed. The main fields of metrological activities having effect on the quality of products testing and used at testing laboratories are given.

机译：分析了计量学对产品测试，合格评定和质量体系的影响。给出了影响产品测试质量并在测试实验室中使用的计量活动的主要领域。

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《International Siberian Conference on Control and Communications》|2017年|1-3|共3页
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R. Zh. Aymagambetova;
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关键词
Testing; Standards; Semiconductor device measurement; Metrology; Certification; Calibration; Measurement units;

机译：测试;标准;半导体器件测量;计量学;认证;校准;测量单位;

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1. Virtual metrology-based engineering chain management by multi-classification of quality using support vector machine for semiconductor manufacturing [J] . Sumika Arima International journal of industrial and systems engineering . 2011,第1期

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2. Implementing virtual metrology for in-line quality control in semiconductor manufacturing [J] . Jason Chao-Hsien Pan, Damon HE Tai International journal of systems science . 2009,第5期

机译：实施虚拟计量以进行半导体制造中的在线质量控制
3. Nikon Metrology checks power semiconductor devices in production line [J] . Insight . 2018,第4期

机译：尼康计量学检查生产线中的功率半导体器件
4. Interrelation of metrology, testing and quality in semiconductor production [C] . R. Zh. Aymagambetova International Siberian Conference on Control and Communications . 2017

机译：半导体生产中计量，测试和质量的相互关系
5. Production planning and scheduling for semiconductor device testing. [D] . Carmon, Tali Fried. 1995

机译：半导体器件测试的生产计划和计划。
6. Production and validation of durable high quality standardized malaria microscopy slides for teaching testing and quality assurance during an era of declining diagnostic proficiency [O] . Jason D Maguire, Edith R Lederman, Mazie J Barcus, 2006

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7. An Auto Metrology Sampling Method Considering Quality and Productivity for Semiconductor Manufacturing Process [O] . Myung-Goo Shin, Jee-Hyung Lee 2012

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Interrelation of metrology, testing and quality in semiconductor production

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