Calorimeters are critical tools for structural based drug design and drug stability assessment. Current pharmaceutical industry is seeking for high throughput calorimeters to reduce the research time and expenditure. MEMS-based calorimeter is a potential solution for it, since they are miniaturized to detect the enthalpy change during macro molecular interaction with smaller amount of samples, shorter time and could easily enable parallel measurement. Consequently, we present a Differential Scanning Calorimeter (DSC) that requires 2uL sample volume. It has high thermal insulation (1210μW/K), small time constant (6.95s) and high sensitivity (7.5V/W). The low noise equivalent temperature difference (NETD) could lead to 130nW of power resolution. These characterization results indicate the device could be potentially applied for macromolecular interaction application and increase the throughput with high performance.
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