A 2D resonant MEMS scanner with an ultra-compact wedge-like multiplied angle amplification for miniature LIDAR application

摘要

In this paper, we propose a two-dimensional resonant MEMS scanning mirror with an integrated ultra-compact multiplied angle amplification for miniature LIDAR application. A wedge-like structure is designed to magnify scanning angle of a 2D MEMS scanner which can also reduce driving voltage, decrease maximum stress and increase reliability and life. Compared with other angle amplification, the wedge does not consist of any complex optical lens or structures. The amplification is more compact than former that only 1mm increasing in height of package is needed for enlarging angle. A double scanning angle amplification is experimented. Appling a voltage of 12.5V peak-to-peak(7.5Vac at frequency of 710Hz and 5Vac at frequency of 997Hz) results in optical scan of 45.3° in x-axis and 42.6° in y-axis at atmosphere pressure which is rather low driving voltage for 2D resonant MEMS scanner at present.