CHIP-SCALE LIDAR WITH A SINGLE 2D MEMS SCANNER

摘要

A LIDAR system, a LIDAR chip, and a LIDAR chip manufacturing process. The LIDAR system includes a photonic chip configured to transmit a transmitted light beam and receive a reflected light beam, a scanner to direct the transmitted light beam in a direction in space and receive the reflected light beam from the selected direction, and a fiber optic based optocoupler , The photonic chip and the scanner are arranged on a semiconductor integration platform (SIP). The optical fiber based optocoupler is placed on the photonic chip for optical coupling with the photonic chip for directing the transmitted light beam from the photonic chip to the scanner, and for directing a reflected light beam from the scanner to the photonic chip.