Resonant germanium-on-silicon photodetector with evanescent waveguide coupling

摘要

A 4.5-μm-radius resonant germanium-on-silicon photodetector is first demonstrated with evanescent coupling from bus waveguide, achieving 2.03nA dark current, 1.04A/W responsivity at 1530nm, 32.9GHz electro-optic bandwidth and enhancement on responsivities for longer wavelengths (>0.3A/W at 1630nm).