Fabrication and characterization of low pressure graphene-based gas sensor

摘要

We discuss fabrication, characterization of graphene sensor for detection of different gases at low pressure. Two types of micro devices were fabricated, the first one is the kelvin structure and the second one is the membrane structure. Cavities were etched in the SiO2 to form the membrane. Two techniques for synthesis of Graphene was used in this work: Chemical vapor deposition using Cu as catalyst and Inkjet printing. Electrical characterization for the graphene sensor was done in atmospheric pressure as well as Raman imaging.