Real-time test data acquisition and data processing enabling closed loop control systems for adaptive test

摘要

Beside it's advantages conventional semiconductor testing is quiet a fixed and rigid process. For instance the list of applied tests, test limits or test flows are always the same for each device. Human involvement is needed for any kind of adaption or improvement. However, in recent times more and more dynamic approaches of testing are getting established in the industry and falling under the category of so-called “adaptive test”. This work demonstrates an adaptive test approach with real-time data acquisition and decision making capabilities. Real-time (RT), implies in this context, data is available and decisions are done after each single measurement within the test sequence of one device under test (DUT). The question of additional overhead in test time and thus feasibility of real-time adaptive test where targeted. With the introduced adaptive test framework, it has been shown that RT adaptive testing with minimal additional test time is feasible.