Overall non-linear correction of phase shifting mechanism in white light interferometry system based on displacement feedback control combined with fuzzy PID control

摘要

The non-linearity of the phase shifting mechanism in white light interferometry system can seriously affect the measuring accuracy of the system. In this paper, the correcting method is to combine the displacement feedback control technology with the fuzzy PID control technology. Displacement feedback control mechanism and fuzzy PID controller are designed and then try to figure it out through Matlab simulation and experiment.. The result shows that combining the displacement feedback control technology with the fuzzy PID control technology can fulfill decent overall non-linear correction in the white light interferometry measuring system. Meanwhile, the accuracy of the correction is high and the non-linearity drop from 2% to 0.1%.