首页> 外文会议>ASME international technical conference and exhibition on packaging and integration of electronic and photonic microsystems >THERMAL DIFFUSION TOMOGRAPHY FOR QUANTITATIVE NON-DESTRUCTIVE CHARACTERIZATION OF ELECTRONIC PACKAGES
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THERMAL DIFFUSION TOMOGRAPHY FOR QUANTITATIVE NON-DESTRUCTIVE CHARACTERIZATION OF ELECTRONIC PACKAGES

机译:热扩散层析成像技术用于电子包装的定量非破坏性表征

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Thermal management problems in electronic packages have been a challenging problem due to increasing number of transistors in chips and reduction in product size. Thermal interface materials (TIM) help heat dissipation by reducing thermal contact resistance between chip and integrated heat spreader (IHS) and TIM quality is critical for effective removal of heat generated from the package. Therefore, identification of defects within TIM is required during package assembly process development. Imaging techniques such as computerized scanning acoustic microscopy (CSAM) and X-ray tomography are used as non-destructive testing techniques to identify TIM defects qualitatively. More recently, it was shown that IR thermography can be used as a qualitative means of identifying defects as well. Thermal diffusion tomography is a powerful alternative to those techniques due to its lower cost and ease of application. In this study, quantitative characterization of defects in TIM is presented using thermal diffusion tomography. The study is conducted considering a high density interconnect flip chip package that includes spreading effect due to different sized IHS and die. Defect size and location are detected analyzing the measured thermal response of electronic package by solving the resulting inverse problem by Levenberg-Marquardt algorithm as an image reconstruction technique.
机译:由于芯片中晶体管数量的增加和产品尺寸的减小,电子封装中的热管理问题已成为具有挑战性的问题。热界面材料(TIM)通过减少芯片与集成散热器(IHS)之间的热接触电阻来帮助散热,而TIM的质量对于有效去除封装产生的热量至关重要。因此,在封装组装工艺开发过程中需要识别TIM中的缺陷。诸如计算机扫描声学显微镜(CSAM)和X射线断层扫描等成像技术被用作无损检测技术,以定性地识别TIM缺陷。最近,显示出红外热成像也可以用作鉴定缺陷的定性手段。由于其较低的成本和易于应用,热扩散断层扫描是这些技术的有力替代方案。在这项研究中,使用热扩散层析成像技术对TIM中的缺陷进行了定量表征。该研究是在考虑高密度互连倒装芯片封装的情况下进行的,该封装包括由于尺寸不同的IHS和裸片而产生的扩散效应。通过使用Levenberg-Marquardt算法(作为图像重建技术)解决由此产生的逆问题,可以分析电子封装的热响应来检测缺陷的大小和位置。

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