Effect of electron kinetics on global simulations for inductively coupled plasma sources

摘要

Summary form only given. Electron energy probability functions and electron heating mechanism strongly affect plasma parameters such as the electron temperature and plasma density in high density plasma sources. In order to analyze the effect, we developed a self-consistent global simulator for inductively coupled plasma sources. To obtain EEPF theoretically, we numerically solve the Fokker-Planck equation which couple the global transport model in a self-consistent manner. Absorbed power by electrons and the energy diffusion coefficient are determined by an analytic electron heating theory including the anomalous skin effect. The simulation results are then compared with experimental measurements such as the plasma density, electron temperature, and EEPF on external controllable parameters such as power and pressure. In particular, results show that the electron heating model should be combined for the global transport model to obtain the accurate electron temperature at pulsed plasma conditions.