In this paper, the alcohol gas sensors based on TiO thin films deposited by DC magnetron sputtering were fabricated. The effect of annealing temperature on the sensitivity of the samples was invested by varying the annealing temperature from 250°C to 550°C. The surface morphology and crystal orientation were characterized by Atomic Force Microscope (AFM) and X-ray diffraction (XRD). It was found that the sensitivity of the sample annealed at 450°C was higher than that of other samples.
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