Control of an air spring type anti-vibration apparatus with an inverse function for shape of pressure frequency characteristic

摘要

An air-type anti-vibration apparatus is widely used in the field of precision positioning and measurement. Due to the characteristics of the air spring, a pair of anti-resonance and resonance occurs in the pressure control system. In order to avoid the performance degradation of the vibration control, we eliminate the anti-resonance and resonance by designing the control scheme with an inverse function.