Infrared Thermal Imaging Sensor using Vacuum Evaporated Eu(TTA)_3 Film

摘要

This paper describes a design, fabrication and evaluation of an infrared thermal imaging sensor using vacuum deposited Eu(TTA)_3 thin film. The Eu(TTA)_3, which emits the temperature dependent luminescence, was deposited on a high thermal isolation polymer structure made by MEMS technology. The temperature sensitivity of the vacuum deposited Eu(TTA)_3 was about -2.1%/°C. A sensor array with 76 × 98 pixels was fabricated and a thermal image of human could be successfully obtained.