Effect of Annealing Temperature and Surface Adsorption (Fe-, Pd-) on SnO_2 Gas Sensor

摘要

In this work, the response characteristics of PdCl2- and FeCl2-coated RF-sputtered SnO_2 thin films for methane detection was reported. Influence of annealing temperature on the response characteristics was investigated for the pure sample and coated samples. The experimental results demonstrated that lwt% PdCl2 annealed at 350°C showed a high response for 200 ppm of methane at 200 °C. It is also indicated that the annealing process increases the amount of adsorbed oxygen present on the SnO2 thin film surface and enhances the penetration of Pd into films, the combined effects likely contribute to the improvement of the response characteristics.