Simple and precise measurement of the complex refractive index and thickness for thin films

摘要

We demonstrate applications of a novel scheme which is used for measuring refractive index and thickness of thin film by analyzing the relative phase difference and reflected ratio at reflection point of a monolithic folded Fabry-Perot cavity (MFC). The complex refractive index and the thickness are calculated according to the Fresnel formula. Results show that the proposed method has an improvement in accuracy with simple and clear operating process compared with the conventional Ellipsometry.