A process for the objective and precise thickness measurement on a microscopic scale of thin films

摘要

In a method and a device for determining the thickness of a thin layer, which on a surface is deposited, is a section prepared and a digital image of the cut is obtained. It is an intensity profile in the direction of thickness of the layer is dissolved out from the digital image, and on the basis of predefined properties of the intensity profile is analysed, in order to determine precisely the layer thickness. This method is particularly advantageous in the determination of the layer thickness, if the layer is formed on a curved surface.