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Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

机译：使用非等距四点探针的钌薄膜精确薄膜电阻和厚度评价的霍尔效应测量

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Frederik Westergaard Østerberg; Maria-Louise Witthøft; Shibesh Dutta; Johan Meersschaut; Christoph Adelmann; Peter Folmer Nielsen; Ole Hansen; Dirch Hjorth Petersen;
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1. Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes [J] . Frederik Westergaard ?sterberg, Maria-Louise Witth?ft, Shibesh Dutta, AIP Advances . 2018,第5期

机译：使用非等距四点探针的钌薄膜精确薄膜电阻和厚度评价的霍尔效应测量
2. Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions [J] . Dirch Hjorth Petersen, Rong Lin, Torben Mikael Hansen, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2008,第1期

机译：基于尺寸的四点探针薄层电阻在激光退火超浅结上的测量比较研究
3. Differential Thickness Layer Resistance Measurement method for measurements of contact resistance of organic semiconductor thin films [J] . Nahlik Josef, Hermanova Martina, Bohacek Jan, Measurement . 2015,第Null期

机译：差分厚度层电阻测量方法，用于测量有机半导体薄膜的接触电阻
4. Design and Evaluation of a High-accuracy Measurement System for Sheet Resistance of Thin Films [C] . Haibin Pan, Jianning Ding, Baoguo Cao International Conference of the Chinese Society of Micro-Nano Technology . 2014

机译：薄膜薄膜电阻高精度测量系统的设计与评价
5. Effect of grain size and thickness of indium tin oxide (ITO) thin films on sheet resistance and transmittance: TEM study [D] . Chan, Tam Yau. 2001

机译：ITO薄膜的晶粒尺寸和厚度对薄层电阻和透射率的影响：TEM研究
6. Dependence of lattice strain relaxation absorbance and sheet resistance on thickness in textured ZnO@B transparent conductive oxide for thin-film solar cell applications [O] . Kuang-Yang Kou, Yu-En Huang, Chien-Hsun Chen, 2016

机译：薄膜太阳能电池应用中织构化的ZnO @ B透明导电氧化物中晶格应变松弛吸光度和薄层电阻对厚度的依赖性
7. Integration of a visual tracking system into a four probe measuring system to evaluate the electrical sheet resistance of thin films [O] . Curi Grados Osmar Giordano Adolfo 2017

机译：将视觉跟踪系统集成到四探针测量系统中，以评估薄膜的薄层电阻
8. A computer program to calculate the resistivity of a thin film deposited on a conductive substrate from four-point probe measurements [R] . Oberle, L. G., Fralick, G. C. 1986

机译：一种计算机程序，用于通过四点探针测量来计算沉积在导电基板上的薄膜的电阻率

Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes

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