MEASUREMENT OF FILM THICKNESS, AND MEASUREMENT OF REFRACTIVE INDEX OF DIAMOND-LIKE CARBON THIN FILM

摘要

PROBLEM TO BE SOLVED: To accurately measure, with use of near-infrared light, the film thickness and refractive index of a DLC thin film formed on outer and inner surfaces of a substrate of any shape, such as planar shape, cylindrical shape, and free shape.;SOLUTION: A product of film thickness and an refractive index is calculated by the vertically reflected interference spectrum measurement, by using as a light source, the range of wavelengths of near-infrared light, in which a diamond-like carbon thin film containing a graphite component is translucent. Furthermore, the refractive index of an identical point on a sample to be subjected to interference measurement is determined, by using an identical light source, to measure a Brewster's angle that is determined solely by the refractive index of a reflective substance, using slope incidence and reflection measuring gauge. As a result, an accurate film thickness is obtained.;COPYRIGHT: (C)2011,JPO&INPIT