Highly sensitive resistive type single-axis tactile sensor with liquid pocket

摘要

In this paper, we propose the resistive type tactile sensor with a liquid pocket. The tactile sensor with polymer substrate has two components which are the sensing element and the structural part. The sensing part is surrounded by PDMS (Sylgard 184) which is relatively solid. To make the sensor more sensitive, we design the upper part of the sensing element in a shape of half-sphere filled with a liquid (silicone oil). When the force is applied to the sensor, the liquid pressure increases and evenly presses down the sensing element to deform. The size of sensor is 7 × 3 × 1 mm including the wiring part. The good sensitivity (0.012 S/kPa~(-1)) of the fabricated sensor is experimentally verified.