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Reliability and instabilities in GaN-based HEMTs

机译:GaN基HEMT的可靠性和不稳定性

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摘要

This talk reviews the physical mechanisms that limit the performance and the reliability of GaN-based high electron mobility transistors (HEMTs), by comparing experimental data with the results presented in the literature. We discuss the following relevant aspects: (i) exposure to high electric field, in the off-state, may induce a significant trapping of charge within the device; this may induce an increase in the on-resistance, or a shift in the threshold voltage, that may negatively affect the performance of the devices; (ii) trapping may also be induced by the presence of hot electrons which, accelerated by the electric field, may achieve enough energy to be injected into the buffer and/or in the barrier layer; (iii) several mechanisms can be responsible for the degradation of GaN-based HEMTs: the generation of gate leakage paths, the generation of defects due to hot electrons, the delamination of the passivation, electrochemical reactions at the surface; (iv) the breakdown voltage of HEMTs is often lower that the theoretical value, due to a number of mechanisms, including the existence of punch-through current components, vertical drain-bulk leakage, and impact ionization.
机译:本演讲通过将实验数据与文献中的结果进行比较,回顾了限制GaN基高电子迁移率晶体管(HEMT)的性能和可靠性的物理机制。我们讨论以下相关方面:(i)在断开状态下暴露于高电场下,可能会导致设备内大量电荷被捕获;这可能会导致导通电阻增加或阈值电压发生偏移,从而可能会对器件的性能产生负面影响; (ii)捕获也可能是由于热电子的存在而引起的,热电子在电场的作用下加速,可以达到足以注入缓冲层和/或势垒层的能量; (iii)GaN基HEMT退化的几种机制可能是:栅极泄漏路径的产生,由于热电子引起的缺陷的产生,钝化的分层,表面的电化学反应; (iv)HEMT的击穿电压通常低于理论值,这是由于多种机制引起的,包括存在穿通电流分量,垂直漏漏泄漏和碰撞电离。

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